High fidelity, high yield production of microfluidic devices by hot embossing lithography: rheology and stiction
نویسندگان
چکیده
منابع مشابه
Characterisation of PMMA microfluidic channels and devices fabricated by hot embossing and sealed by direct bonding
In this study we fabricated a silicon-based stamp with various microchannel arrays, and demonstrated successful replication of the stamp microstructure on poly methyl methacrylate (PMMA) substrates. We used maskless UV lithography for the production of the micro-structured stamp. Thermal imprint lithography was used to fabricate microfeatured fluidic platforms on PMMA substrates, as well as to ...
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Compared with UV embossing and micro-contact imprinting, hot embossing technology is the first to be used in nano-imprint lithography, and is access to copying the parallel structure in micro-nano-scale at low cost and relatively faster speed. This paper explores which factors influence some pattern transferring accuracy appearing in the experiment: the adhesion between mold and polymethyl meth...
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Clinically relevant studies of cell function in vitro require a physiologically-representative microenvironment possessing aspects such as a 3D extracellular matrix (ECM) and controlled biochemical and biophysical parameters. A polydimethylsiloxane (PDMS) microfluidic system with a 3D collagen gel has previously served for analysis of factors inducing different responses of cells in a 3D microe...
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In this paper, we describe a simple and rapid method of fabricating hot embossing tools using polydimethylsiloxane (PDMS), which are then used to rapidly fabricate microchannels in polymethylmethacrylate (PMMA). A negative photoepoxy SU-8 or thick positive photoresist AZ4620 on silicon was used for molding during PDMS casting. Fabrication time of these PDMS tools was considerably less than thos...
متن کاملPolymer Embossing Tools for Rapid Prototyping of Plastic Microfluidic Devices
In this work, a new MEMS technology for hot embossing using polydimethylsiloxane (PDMS) tools is developed and characterized. The developed technology will permit low cost, simple, and rapid fabrication of disposable microfluidic biochips and plastic microstructures for numerous BioMEMS applications. For traditional planar systems, a negative photoepoxy (SU-8) or thick positive photoresist (AZ4...
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ژورنال
عنوان ژورنال: Lab on a Chip
سال: 2006
ISSN: 1473-0197,1473-0189
DOI: 10.1039/b600584e